Coating processes – Electrical product produced – Condenser or capacitor
Patent
1984-02-17
1987-03-10
Childs, Sadie L.
Coating processes
Electrical product produced
Condenser or capacitor
427 85, 427 86, 427 87, 427166, 4272481, 427250, 427255, 4272552, B05D 512
Patent
active
046490248
ABSTRACT:
A method and apparatus are provided for producing fine quality pnictide films by vacuum evaporation and molecular beam deposition. A pnictide source, preferably phosphorous, is heated to produce a continuous supply of vapor species, preferably P.sub.4. The vapor species is cracked by a heated tungsten wire positioned adjacent the pnictide source to produce P.sub.2 molecules. A second tungsten wire cracker is located adjacent a substrate to prevent the recombination of P.sub.2 molecules into P.sub.4 molecules. The P.sub.2 molecules are deposited on the substrate and condense into amorphous pure phosphorous shiny red films. A separate source of alkali metal intercalate, preferably KC.sub.8, may also be heated to provide an alkali metal vapor for producing films of alkali metal polypnictide films, preferably KP.sub.x where x is equal to or greater than 15, to be deposited on the substrate. Fine quality films may also be deposited on a substrate by a molecular beam apparatus providing a continuous source of pnictide vapor species and a cracker disposed between the exit of a pnictide collimator and the substrate.
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Baumann John A.
Brock David G.
Childs Sadie L.
Davis IV F. Eugene
Stauffer Chemical Company
Stone Mark P.
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