Electric lamp or space discharge component or device manufacturi – Process – With assembly or disassembly
Patent
1999-02-12
2000-08-01
Ramsey, Kenneth J.
Electric lamp or space discharge component or device manufacturi
Process
With assembly or disassembly
445 50, H01J 902
Patent
active
060958820
ABSTRACT:
A method for creating emitters of a field emission device is provided. First, a hardmask layer is deposited on a substrate used to form emitters. On the hardmask layer, a photoresist layer is deposited. Islands of photoresist are exposed by an exposing energy through holes in a mask layer. The mask layer is removed and the substrate soft-baked in an oven having an atmosphere of basic gas. Following the soft-bake, the substrate is flood exposed, and then developed using conventional means, leaving behind hardened islands of exposed and baked photoresist. The hardmask layer is etched using the hardened islands as an etching barrier, and the substrate etched with a chemical etchant using the etched hardmask layer as an etching barrier. The etching continues until the substrate material below the etched hardmask layer is formed into an array of points of substrate. Once these emitter sites are formed, a field emission display having uniform emitters can be created.
REFERENCES:
patent: 4107070 (1978-08-01), Moritz et al.
patent: 4775609 (1988-10-01), McFarland
patent: 4814243 (1989-03-01), Ziger
patent: 5372973 (1994-12-01), Doan et al.
patent: 5391259 (1995-02-01), Cathey et al.
patent: 5766829 (1998-06-01), Cathey, Jr. et al.
patent: 5891321 (1999-04-01), Bernhardt
Lucas, Mark, "Lithography for FED Production," Information Display, 4&5, 1997, pp. 20-23.
Mack, Chris A., "Understanding focus effects in submicron optical lithography," Optical/Laser Microlithography, SPIE vol. 922, 1988, pp. 135-147.
Cathey David A.
Wells David H.
Micro)n Technology, Inc.
Ramsey Kenneth J.
LandOfFree
Method for forming emitters for field emission displays does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for forming emitters for field emission displays, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming emitters for field emission displays will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-658484