Method for forming electron emitters

Details Method for forming electron emitters Method for forming electron emitters

1993-07-07

1996-07-02

Nguyen, Tuan H.

Fishing, trapping, and vermin destroying

437228, 437974, 437916, 148DIG116, 148DIG172, H01L 21265

Patent

active

055321771

ABSTRACT:
Electron emitters and a method of fabricating emitters which have a concentration gradient of impurities, such that the highest concentration of impurities is at the apex of the emitters, and decreases toward the base of the emitters. The method comprises the steps of doping, patterning, etching, and oxidizing the substrate, thereby forming the emitters having impurity gradients.

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