Method for forming electrode on diamond for electronic devices

Details Method for forming electrode on diamond for electronic devices Method for forming electrode on diamond for electronic devices

1996-03-29

1998-06-23

Trinh, Michael

Fishing, trapping, and vermin destroying

437176, 437977, 148DIG100, 430311, H01L 21441

Patent

active

057704678

ABSTRACT:
Disclosed is a method of forming electrodes on diamond comprising the steps of: forming a mask pattern on diamond or diamond film; performing a treatment of the diamond surface by a plasma of inert gases; forming an electrode film on the whole surface of the specimen; and removing the mask, thereby forming a specified pattern of the electrodes. By this method, it is possible to form electrodes having high adhesion to diamond and diamond film for electronic devices.

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