Method for forming electrical contact to the optical coating of

Details Method for forming electrical contact to the optical coating of Method for forming electrical contact to the optical coating of

1996-08-30

1998-04-14

Hughes, S. Thomas

Metal working

Electric condenser making

Solid dielectric type

29846, 1566481, 2503381, 437 3, H01L 3118

Patent

active

057378185

ABSTRACT:
This is a system and method of forming an electrical contact to the optical coating of an infrared detector. The method may comprise: forming thermal isolation trenches 22 and contact vias 23 in a substrate 20; depositing a bias contact metal 32 into the vias 23 forming biasing contact areas around a periphery of the substrate 20; depositing a first trench filler 24 in the trenches 22 and vias 23; replanarizing; depositing a common electrode layer 25 over the thermal isolation trenches and the biasing contact areas; mechanically thinning the substrate 20 to expose the biasing contact area 32 and the trench filler 24; depositing a contact metal 34 on the backside of the substrate 20, the exposed trench filler 24 and the exposed bias contact area; and etching the contact metal 34 and the trench filler 24 to form pixel mesas of the contact metal 34 and the substrate 20. The thermal isolation trenches 22 and the bias contact vias 23 may be formed by ion milling or laser vaporization. Alternately, the bias contact areas 23 may be formed by performing laser vaporization on the substrate 20 to produce conductive 23 areas within the substrate.

REFERENCES:
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patent: 4728997 (1988-03-01), Szydlo et al.
patent: 5051378 (1991-09-01), Yagi et al.
patent: 5134081 (1992-07-01), Yamazaka et al.
patent: 5367166 (1994-11-01), Matthews et al.
patent: 5367167 (1994-11-01), Keenan
patent: 5456797 (1995-10-01), Weber et al.

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