Method for forming diamondlike carbon coating

Details Method for forming diamondlike carbon coating Method for forming diamondlike carbon coating

1991-05-28

1993-03-09

Kunemund, Robert

Coating processes

Direct application of electrical, magnetic, wave, or...

Ion plating or implantation

501 86, 427577, 20415747, 204173, 423446, C01B 3104

Patent

active

051925230

ABSTRACT:
A method of depositing a diamondlike carbon coating on a substrate. An ionized beam of pure methane or methane and hydrogen, and having an ion kinetic energy in the range of 500-1,000 eV is impinged on a substrate to deposit, thereon, a diamondlike carbon coating. Various substrates can be utilized, and various cleaning procedures are developed for use with the particular substrates to improve the adhesion of the diamondlike carbon coatings. The methane-hydrogen ratio and the operating pressure of the ionized gas can each be varied to vary the carbon-hydrogen ratio of the resulting diamondlike coating to thereby alter the characteristics of the coating.

REFERENCES:
patent: 3961103 (1976-06-01), Aisenberg
patent: 4437962 (1984-03-01), Banks
patent: 4504519 (1985-03-01), Zelez
patent: 4740263 (1988-04-01), Imai et al.

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