Method for forming deposited film

Details Method for forming deposited film Method for forming deposited film

1986-12-16

1989-04-18

Childs, Sadie L.

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

427 70, 427255, 4272552, 4272553, 4272557, B05D 506, B05D 512

Patent

active

048226360

ABSTRACT:
A method for forming a deposited film by introducing a gaseous starting material for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action on said starting material separately from each other into a reaction space to form a deposited film according to a chemical reaction, which comprises activating previously a gaseous substance (D) for formation of a valence electron controller in an activation space to form an activated species and introducing said activated species into the reaction space to form a doped deposited film.

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