Method for forming deposited film

Details Method for forming deposited film Method for forming deposited film

1986-10-22

1989-04-04

Childs, Sadie

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

427 70, 427255, 4272551, 4272552, 437225, B05D 506, B05D 512, C23C 1600

Patent

active

048185647

ABSTRACT:
A method for forming a deposited film comprises introducing a gaseous starting material for formation of a deposited film and a gaseous halogenic oxidizing agent having the property of oxidation action for said starting material into a reaction space to effect chemical contact therebetween to thereby form a plural number of precursors containing precursors under excited state, and forming a deposited film on a substrate existing in the film forming space with the use of at least one precursor of these precursors as the feeding source for the constituent element of the deposited film.

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