Method for forming data lines of a liquid crystal display...

Details Method for forming data lines of a liquid crystal display... Method for forming data lines of a liquid crystal display...

2005-10-04

2005-10-04

Nguyen, Dung T. (Department: 2871)

Liquid crystal cells, elements and systems

Particular structure

Having significant detail of cell structure only

C349S147000, C349S149000

Reexamination Certificate

active

06952251

ABSTRACT:
A method for forming data lines of a liquid crystal display device, wherein a double data line is adopted as a data line while the contact resistance with a transparent electrode is maintained at the same level as in the conventional art, whereby about 150 seconds of sputter equipment use time for forming the triple data line in the conventional art can be reduced to about 85 seconds by forming the double data line. The double data line of a pad part is used as a source/drain region at a TFT part, so that a CD bias at the source/drain region metal layer is improved.

REFERENCES:
patent: 5456978 (1995-10-01), Lal et al.
patent: 5919580 (1999-07-01), Barnard et al.
patent: 6414730 (2002-07-01), Akamatsu et al.
patent: 6493048 (2002-12-01), Baek et al.
patent: 6628361 (2003-09-01), Takahashi et al.
patent: 2002/0180898 (2002-12-01), Yoo et al.

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