Fishing – trapping – and vermin destroying
Patent
1996-04-24
1997-03-04
Chaudhari, Chandra
Fishing, trapping, and vermin destroying
437195, 437978, H01L 21768
Patent
active
056078730
ABSTRACT:
The overetching that occurs during the formation of contact openings in a substantially planarized layer of insulation material is substantially reduced by changing the thickness of the insulation material that is formed over the top conductive structure of a semiconductor device, and by forming the openings to the top conductive structure during the fabrication of a second metal layer rather than during the formation of a first metal layer.
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Chen Hung-Sheng
Moberly Larry
Nguyen Tim
Teng Chih S.
Chaudhari Chandra
National Semiconductor Corporation
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