Method for forming conductive or insulating layers

Radiation imagery chemistry: process – composition – or product th – Visible imaging including step of firing or sintering

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430157, 430163, 430332, G03C 1100

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active

056724608

ABSTRACT:
The present invention aims to solve problems involved in the formation of a conductive or insulating layer in a pattern form by photolithography, i.e., an environmental problem associated with handling a solvent and a problem associated with wastewater treatment in the development with an aqueous alkaline solution. A method for forming a conductive layer (an anode bus 3) or an insulating layer (a barrier 1) on a glass substrate by photolithography using a photosensitive slurry solution prepared by mixing a low-melting glass powder as a binder and a conductive or insulating powder into a PVA-based, water-soluble photosensitive solution, wherein the content of B.sub.2 O.sub.3 component in the whole low-melting glass powder is closely regulated to not more than 6% by weight. This enables coating without gelation of PVA. Unlike the conventional photolithography using a solvent type photosensitive slurry, the method of the present invention can solve the environmental problem associated with handling a solvent and the problem associated with wastewater treatment in the development with an aqueous alkaline solution.

REFERENCES:
patent: 4590148 (1986-05-01), Takahashi et al.
patent: 4598037 (1986-07-01), Felten
patent: 5009972 (1991-04-01), Higuchi et al.
patent: 5286269 (1994-02-01), Paschke et al.

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