Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate
2005-10-18
2005-10-18
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Metal coating
C427S255700, C427S596000, C204S192100
Reexamination Certificate
active
06955835
ABSTRACT:
A layer of compressive alpha-tantalum is formed on a substrate by depositing a buffer layer on the substrate and depositing a layer of compressive alpha-tantalum on the buffer layer with lattice matching between the layer of compressive alpha-tantalum and the buffer layer. In some embodiments, the method may include depositing buffers layers comprising titanium, niobium, substantially pure aluminum or aluminum-copper alloy.
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Meeks Timothy
Turocy David
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