Metal working – Piezoelectric device making
Reexamination Certificate
2011-08-23
2011-08-23
Banks, Derris H (Department: 3729)
Metal working
Piezoelectric device making
C029S851000, C264S297100, C264S317000
Reexamination Certificate
active
08001666
ABSTRACT:
A method is provided that includes providing a mold on a temporary substrate, e.g., a sapphire substrate. Next, a material such as PZT paste is deposited into the mold. Then, the mold is removed to obtain elements formed by the mold. The formed elements will then be sintered. After sintering, electrode deposition is optionally performed. The sintered elements are then bonded to a final target substrate and released from the temporary substrate through laser liftoff. Further, electrodes may also be optionally deposited at this point.
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Partial European Search Report.
Buhler Steven A.
White Stephen D.
Xu Baomin
Banks Derris H
Carley Jeffrey
Fay Sharpe LLP
Palo Alto Research Center Incorporated
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