Semiconductor device manufacturing: process – Making device array and selectively interconnecting – Rendering selected devices operable or inoperable
Patent
1994-10-05
1997-08-26
Niebling, John
Semiconductor device manufacturing: process
Making device array and selectively interconnecting
Rendering selected devices operable or inoperable
438340, H01L 21265
Patent
active
056610475
ABSTRACT:
A method of forming bipolar ROM device on a semiconductor substrate comprises forming a collector region by doping with a dopant of a first polarity, forming an array of common base regions by doping with a dopant of an opposite polarity, forming a plurality of emitter regions selectively in the base regions by doping with a dopant of first polarity and diffusing the dopant into the emitter regions from doped conductors, which conductors are formed as an array of conductors disposed orthogonally relative to the array of common base elements. The conductors are connected to emitter regions traversed thereby and are isolated from other regions by dielectric layers selectively formed over the other regions to prevent diffusion of dopant therethrough to prevent formation of such emitter regions.
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Hsue Chen-Chiu
Yang Ming-Tzong
Niebling John
Pham Long
United Microelectronics Corporation
Wright William H.
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