Method for forming an array of thin film actuated mirrors

Details Method for forming an array of thin film actuated mirrors Method for forming an array of thin film actuated mirrors

1996-02-08

1997-10-14

Epps, Georgia Y.

Optical: systems and elements

Optical modulator

Light wave temporal modulation

359224, 359850, 359900, 437229, G02B 2600

Patent

active

056777850

ABSTRACT:
An inventive method for the manufacture of an array of M.times.N thin film actuated mirrors for use in an optical projection system includes the steps of: providing an active matrix; depositing a thin film sacrificial layer; creating an array of empty cavities in the thin film sacrificial layer; depositing an elastic layer; forming an array of conduits in the elastic layer; depositing a second thin film, a thin film electrodisplacive and a first thin film layers, successively; patterning the first thin film, the thin film electrodisplacive, the second thin film and the elastic layers, thereby forming an array of actuated mirror structures; forming a thin film protection layer completely covering each of the actuated mirror structures; removing the thin film sacrificial layer by using an etchant; rinsing away the etchant by using a rinse; removing the rinse by drying in a vacuum or by using a spin drying method; and removing the thin film protection layer, thereby forming the array of M.times.N thin film actuated mirrors.

REFERENCES:
patent: 5172262 (1992-12-01), Hornbeck

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