Coating processes – Electrical product produced – Metallic compound coating
Patent
1990-03-23
1991-04-23
Beck, Shrive
Coating processes
Electrical product produced
Metallic compound coating
427109, 427110, 4271262, 427166, 427168, 427314, 4274193, 4274192, 427226, 65 602, 65 6051, 65 6053, B05D 512, C03C 1723
Patent
active
050099280
ABSTRACT:
This invention relates to a method for forming a transparent conductive metal oxide film having good characteristic properties. The method comprises feeding an atomized or gasified starting material onto a substrate to form a metal oxide film on the substrate, wherein the substrate is heated to form a first metal oxide film having a good degree of orientation of crystals and a second film formation step wherein a second metal oxide film is formed on the first metal oxide film under higher substrate temperature conditions than those in the first film formation step to form a second metal oxide film having a degree of orientation of crystals in conformity with that of the first metal oxide film.
REFERENCES:
patent: 4329379 (1982-05-01), Terneu et al.
patent: 4548836 (1985-10-01), Middleton et al.
patent: 4571350 (1986-02-01), Parker et al.
patent: 4788079 (1988-11-01), Lindner
Hayashi Yutaka
Iida Hideyo
Imai Mizuho
Itoh Atuo
Beck Shrive
Japan as represented by general director of Agency of Industrial
King Roy V.
Research Development Corporation of Japan
Taiyo Yuden Co. Ltd.
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