Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board
Patent
1996-12-23
2000-08-22
Meeks, Timothy
Coating processes
Electrical product produced
Integrated circuit, printed circuit, or circuit board
427 99, 427181, 427190, 427191, 427201, 427226, 427229, 427237, 4272481, 4272491, 42725525, 4272557, C23C 1422
Patent
active
06106890&
ABSTRACT:
A method and apparatus for forming a thin film of ultra-fine particles on a base body having a fine hole or groove with a large aspect ratio (larger than one). The ultra-fine particles are smaller than 0.1 .mu.m in diameter and are made from evaporated material. An aerosol is formed by dispersing and floating the ultra-fine particles in a gas at a pressure higher than 10.sup.2 Pa in an aerosol-forming chamber. The base body is held by a holding mechanism within a thin-film forming container. A vacuum system is connected to the thin-film forming container. The aerosol-forming chamber is placed in communication with the thin-film forming container so that the aerosol is applied onto the inner wall surface of the fine hole or the groove. As a result, the ultra-fine particles are diffused and adsorbed onto the inner wall surface.
REFERENCES:
patent: 3840391 (1974-10-01), Spitz et al.
patent: 4332838 (1982-06-01), Wegrzyn
patent: 4405658 (1983-09-01), Young
patent: 5456945 (1995-10-01), McMillan et al.
patent: 5540959 (1996-07-01), Wang
Meeks Timothy
Vacuum Metallurgical Co., Ltd.
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