Method for forming a thin film of a non-stoichiometric metal oxi

Details Method for forming a thin film of a non-stoichiometric metal oxi Method for forming a thin film of a non-stoichiometric metal oxi

1996-08-29

1998-05-12

Utech, Benjamin

Coating processes

Electrical product produced

Metallic compound coating

427162, 4272481, 4273762, B05D 513

Patent

active

057501882

ABSTRACT:
A method for forming a thin film (220) of luminescent zinc oxide includes the steps of: (i) providing a mixture (170) of powdered zinc oxide and powdered graphite, (ii) providing a substrate (140) at a distance of about 9 millimeters from the mixture (170), (iii) disposing the mixture (170) and substrate (140) within an apparatus (100) that provides a confined environment having a partial pressure of oxygen of about 0.21 atmospheres, (iv) heating the mixture (170) to a temperature of about 850 degrees Celsius, and (v) establishing a temperature gradient between the substrate (140) and the mixture (170) of about 15 degrees, the temperature of the substrate (140) being less than the temperature of the mixture (170).

REFERENCES:
patent: 3636919 (1972-01-01), Bozler
patent: 3731353 (1973-05-01), Vecht
patent: 3775173 (1973-11-01), Yamamoto et al.
patent: 3844636 (1974-10-01), Maricle
patent: 3957352 (1976-05-01), Leibowitz
patent: 4223049 (1980-09-01), Murray et al.
patent: 4418118 (1983-11-01), Lindors
patent: 4534099 (1985-08-01), Howe
patent: 5318723 (1994-06-01), Hashemi
patent: 5508368 (1996-04-01), Knapp et al.
"Preparation of ZnO Thin-Film Transducers by Vapor Transport" by Roger F. Belt and Gerald C. Florio; Journal of Applied Physics vol. 39, No. 11, Oct. 1968, pp. 5215-5223.

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