Method for forming a tapered spacer

Details Method for forming a tapered spacer Method for forming a tapered spacer

1997-01-27

1999-05-04

Niebling, John F.

Semiconductor device manufacturing: process

Chemical etching

Having liquid and vapor etching steps

438713, H01L 21302

Patent

active

058997474

ABSTRACT:
A method for forming a gate with a tapered spacer is disclosed. The method includes forming a polysilicon layer on a substrate, and then forming a first oxide layer on the polysilicon layer. A photoresist layer is formed on the first oxide layer, where the photoresist layer defines a gate region, and then portions of the oxide layer and the polysilicon layer are removed using the photoresist layer as a mask, thereby forming a gate. A second oxide layer is formed on the substrate and the first oxide layer. Afterwards, the second oxide layer is isotropically etched so that the slope of the second oxide layer near the upper corners of the gate is reduced. Finally, the second oxide layer is anisotropically etched back to form spacers on the sidewalls of the gate.

REFERENCES:
patent: 3756875 (1973-09-01), Eccleston et al.
patent: 4715930 (1987-12-01), Diem
patent: 4760033 (1988-07-01), Mueller
patent: 4776922 (1988-10-01), Bhattacharyya et al.
patent: 4981810 (1991-01-01), Fazan et al.
patent: 5116460 (1992-05-01), Bukhman
patent: 5328860 (1994-07-01), Lee et al.
patent: 5407837 (1995-04-01), Eklund
patent: 5407847 (1995-04-01), Hayden et al.
patent: 5684319 (1997-11-01), Hebert
patent: 5685950 (1997-11-01), Sato

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