Method for forming a silicon on insulator device

Fishing – trapping – and vermin destroying

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437 26, 437 28, 437 34, 148DIG150, H01L 218238

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active

054260620

ABSTRACT:
A silicon on insulator integrated circuit device is provided which comprises a substrate (10), a buried oxide layer (12), and an outer silicon layer (14). A buried (p)-layer (16) and a buried (n)-well region (26) are formed in order to position (p)-(n) junctions beneath (n)-channel and (p)-channel devices respectively formed in the outer silicon layer (14) outwardly from the (p)-layer (16) and (n)-well (26).

REFERENCES:
patent: 4907053 (1990-03-01), Ohmi
patent: 5079607 (1992-01-01), Sakurai
patent: 5103277 (1992-04-01), Cavaglia
patent: 5294556 (1994-03-01), Kawamura
patent: 5344785 (1994-09-01), Jerome et al.

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