Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Having diverse electrical device
Patent
1999-06-09
2000-07-18
Fahmy, Wael
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Having diverse electrical device
438 29, 438 31, 438 42, 438 46, 438 47, H01L 2100
Patent
active
060906359
ABSTRACT:
A heterostructure device includes a ridge-waveguide laser monolithically integrated with a ridge-waveguide rear facet monitor (RFM). An integral V-groove etched directly into the device substrate enables passive alignment of an optical fiber to the active region of the laser. The layer and RFM facets were formed using an in-situ multistep reactive ion etch process.
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Armiento Craig Alfred
Negri Alfred Joseph
Rothman Mark Alan
Shieh Chan-Long
Thompson John Alvin
Fahmy Wael
GTE Laboratories Incorporated
Pham Long
Suchyta Leonard Charles
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