Method for forming a quartz crystal vibrator

Details Method for forming a quartz crystal vibrator Method for forming a quartz crystal vibrator

1978-04-26

1979-11-27

Weisstuch, Aaron

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

204192C, 29 2535, C23C 1500

Patent

active

041760301

ABSTRACT:
A quartz crystal tuning fork vibrator having thin conductive film side electrodes and a method of forming same is provided. The quartz crystal vibrator is provided with identically configured electrodes on both planar surfaces of the tuning fork tines with the electrodes being peripherally positioned along the respective lengthwise extents of the tines on both planar surfaces with thin conductive film electrodes being disposed on the lengthwise side surfaces of the tines in order to electrically couple the like configured electrodes peripherally disposed on the planar surfaces to each other. The quartz crystal plate and the electrodes formed on the opposed planar surfaces of the tines are formed by photo-etching, whereafter the planar surfaces are masked and a thin conductive film is sputtered on the lengthwise edges to form the electrodes on the side surfaces.

REFERENCES:
patent: 4099078 (1978-07-01), Shibata et al.

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