Method for forming a pressure sensor

Details Method for forming a pressure sensor Method for forming a pressure sensor

1984-01-26

1985-07-30

Goldberg, Howard N.

Metal working

Piezoelectric device making

310324, 361283, H01L 4122

Patent

active

045312672

ABSTRACT:
A pressure sensor comprising a piezoelectric material formed in a geometry which provides a piezoelectric output signal when subjected to a pressure. The piezoelectric material also has a pyroelectric output signal. The present sensor further comprises conductive contacts having a geometry for enhancing the piezoelectric output signal and for substantially eliminating the pyroelectric output signal.

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patent: 3495105 (1970-02-01), Shimano
patent: 3940974 (1976-02-01), Taylor
patent: 3943388 (1976-03-01), Massa
patent: 4060729 (1977-11-01), Byer et al.
patent: 4370583 (1983-01-01), Ljung
patent: 4376919 (1983-03-01), Konno et al.
P. L. Chen, R. S. Muller, R. M. White, R. Jolly, "Thin Film ZnO-MOS Transducer with Virtually DC Response," IEEE 1980 Ultrasonics Symposium.
Frank Massa, "Low-Cost Transducer Opens Up New Uses," May 27, 1960; Electronics, 128-130.
Craig S. Sander, James W. Knutti, James D. Meindl, "A Monolithic Capacitive Pressure Sensor with Pulse-Period Output," May, 1980; IEEE Transactions on Electron Devices, vol. ED-27, No. 5, 927-930.

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