Plastic and nonmetallic article shaping or treating: processes – Pore forming in situ – Composite article making
Reexamination Certificate
2006-04-04
2008-07-15
Davis, Robert B (Department: 1791)
Plastic and nonmetallic article shaping or treating: processes
Pore forming in situ
Composite article making
C264S102000
Reexamination Certificate
active
07399437
ABSTRACT:
The present invention provides a method of forming a chemical mechanical polishing pad comprising, providing a tank with polymeric materials, providing a storage silo with microspheres and providing an isocyanate storage tank with isocyanates. The invention further provides delivering the polymeric materials and the microspheres to a premix prep tank, forming a pre-mixture of the polymeric materials and the microspheres, delivering the pre-mixture to a premix run tank and forming a mixture of the pre-mixture and the isocyanates. Further the invention provides injecting the mixture into a closed mold, curing the polishing pad in the mold and degassing at least one of the tank, isocyanate storage tank and the mold.
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James David B.
Roberts John V. H.
Davis Robert B
Deibert Thomas S.
Oh Edwin
Rohm and Haas Electronics Materials CMP Holdings, Inc.
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