Method for forming a porous polishing pad

Details Method for forming a porous polishing pad Method for forming a porous polishing pad

2006-04-04

2008-10-14

Davis, Robert B (Department: 1791)

Plastic and nonmetallic article shaping or treating: processes

Pore forming in situ

Composite article making

Reexamination Certificate

active

07435364

ABSTRACT:
The present invention provides a method of forming a chemical mechanical polishing pad comprising providing a polymeric matrix with fluid-filled unexpanded microspheres, curing the polymeric matrix and heating the polymeric matrix and the microspheres to expand the microspheres.

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