Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1990-02-08
1992-05-05
Hix, L. T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 77, G03B 2742
Patent
active
051112400
ABSTRACT:
A method in which pattern elements with predetermined wall profiles and/or lateral shapes, differing from the shapes of the respective pattern elements in an irradiation mask which is used, are formed in a photoresist layer. The method comprises a modification of a conventional photolithographic process, where a substrate supporting the photoresist layer is shifted laterally relative to the mask or the mask image in a continuous mode or in steps during exposure. Also disclosed is an apparatus which shifts a substrate relative to a mask in the x- and/or the y-direction or shifts the path of the beam relative to the substrate, controlling the shifting in a predetermined manner. The method--especially in connection with the apparatus--allows formation of reproducible photoresist patterns with a great variety of differently formed wall profiles and/or lateral shapes. Using the method, photoresist patterns can be flexibly adapted to many applications.
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Boettiger Ulrich C.
Hafner Bernhard
Hix L. T,.
International Business Machines - Corporation
Rutledge D.
Sabo William D.
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