Fishing – trapping – and vermin destroying
Patent
1986-10-02
1989-05-02
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437231, H01L 21283, H01L 21316
Patent
active
048267864
ABSTRACT:
A method of forming a planarization layer over a multilayered metal network which interconnects the components of a high-density integrated circuit and which includes conductors having steep edges disposed over a substrate. A layer of spin-on-glass is applied over the lower metal layer so as to have a thickness substantially equal to that of the lower metal layer and to form a thin film over the conductors. The spin-on-glass layer is uniformly etched to expose the upper surfaces of the conductors, and a dielectric layer is applied onto the etched spin-on-glass layer and upper surfaces of the conductors.
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Chantraine Philippe
Lambert Daniel
Merenda Pierre
Bull S.A.
Chaudhuri Olik
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