Method for forming a multilayer superconducting circuit

Superconductor technology: apparatus – material – process – High temperature – per se – Having tc greater than or equal to 150 k

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505701, 505730, 505731, 427 62, 427 63, 427529, 427404, 4274192, 4274193, 427 99, 20419224, 20429802, 156656, B05D 512, H01L 3924

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052293602

ABSTRACT:
A method for forming a superconducting circuit is disclosed, comprising the steps of forming a mask pattern on a superconducting layer, forming a covering layer, containing a modifying element for superconductor, on the resultant structure, diffusing the modifying element for a superconductor, which is contained in the covering layer, into the superconducting layer to modify a corresponding location to a nonsuperconducting layer. A method for forming a multi-layer superconducting circuit is also disclosed, comprising sequentially repeating the same steps as set forth above over a substrate.

REFERENCES:
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patent: 4758525 (1988-07-01), Kida et al.
patent: 4900709 (1990-02-01), Heijman et al.
patent: 4971948 (1990-11-01), Dam et al.
patent: 5051396 (1991-09-01), Yamazaki
Hashimoto et al, "Thermal Expansion Coefficients of High-Tc Superconductors", Jpn. J. Appl. Phys. 27(2) Feb. 1988, pp. 214-216.

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