Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2008-08-01
2011-10-11
Budd, Mark (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S320000, C310S364000
Reexamination Certificate
active
08035277
ABSTRACT:
According to an exemplary embodiment, a method of forming a multi-layer electrode for growing a piezoelectric layer thereon includes a step of forming a high conductivity metal layer over a substrate. The method further includes a step of forming a seed layer over the high conductivity metal layer. The method further includes a step of forming a high density metal layer over the seed layer. The method further includes a step of forming a piezoelectric layer over the high density metal layer. The high conductivity metal layer, the seed layer, and the high density metal layer form the multi-layer electrode on which the piezoelectric layer is grown.
REFERENCES:
patent: 3363119 (1968-01-01), Koneval et al.
patent: 3365591 (1968-01-01), Curran et al.
patent: 3401276 (1968-09-01), Curran et al.
patent: 5325012 (1994-06-01), Sato et al.
patent: 6420202 (2002-07-01), Barber et al.
patent: 6812619 (2004-11-01), Kaitila et al.
patent: 6933809 (2005-08-01), Kyoung et al.
patent: 6984918 (2006-01-01), Hachigo et al.
patent: 7170215 (2007-01-01), Namba et al.
patent: 7276836 (2007-10-01), Umeda et al.
patent: 7323805 (2008-01-01), Sano et al.
patent: 7323953 (2008-01-01), Yokoyama et al.
patent: 7345410 (2008-03-01), Grannen et al.
patent: 7358831 (2008-04-01), Larson et al.
patent: 7482737 (2009-01-01), Yamada et al.
patent: 7489067 (2009-02-01), Metzger et al.
patent: 7597757 (2009-10-01), Conley et al.
patent: 2002/0121840 (2002-09-01), Larson et al.
patent: 2005/0140247 (2005-06-01), Lee
patent: 2006/0103492 (2006-05-01), Feng et al.
patent: 2008/0157629 (2008-07-01), Noguchi et al.
patent: 2009/0045703 (2009-02-01), Barber et al.
patent: 2009/0045704 (2009-02-01), Barber et al.
patent: 2005-210004 (2005-08-01), None
patent: 10-2004-0087676 (2004-10-01), None
patent: 2005008889 (2005-01-01), None
Barber Bradley P.
Carpenter Craig E.
Gehlert Paul P.
Shepard Christopher F.
Avago Technologies Wireless IP (Singapore) Pte.Ltd.
Budd Mark
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