Metal working – Piezoelectric device making
Reexamination Certificate
2007-11-26
2010-02-23
Trinh, Minh (Department: 3729)
Metal working
Piezoelectric device making
C029S594000, C029S595000, C029S025420, C029S846000, C029S847000, C310S31300R, C333S187000
Reexamination Certificate
active
07665196
ABSTRACT:
Provided is a method of manufacturing a multi-frequency surface acoustic wave (SAW) device on a common piezoelectric substrate. The method features varying the resonant frequency of waveguide elements of the SAW device using a single etch step. The etch step removes a sub-portion of multiple layers of conductive film disposed on the substrate.
REFERENCES:
patent: 4567393 (1986-01-01), Asai et al.
patent: 4952832 (1990-08-01), Imai et al.
patent: 5390401 (1995-02-01), Shikata et al.
patent: 5426340 (1995-06-01), Higaki et al.
patent: 5589806 (1996-12-01), Taguchi et al.
patent: 5872415 (1999-02-01), Dreifus et al.
patent: 5895996 (1999-04-01), Takagi et al.
patent: 6127769 (2000-10-01), Kadota et al.
patent: 6246148 (2001-06-01), Flowers et al.
patent: 6367133 (2002-04-01), Ikada et al.
patent: 6495398 (2002-12-01), Goetz
patent: 6507097 (2003-01-01), Goetz et al.
patent: 6580197 (2003-06-01), Flowers
patent: 6593678 (2003-07-01), Flowers
patent: 6621379 (2003-09-01), Goetz et al.
patent: 6639150 (2003-10-01), Goetz et al.
patent: 6649446 (2003-11-01), Goetz et al.
patent: 6650205 (2003-11-01), Goetz et al.
patent: 6734599 (2004-05-01), Flowers et al.
patent: 6744336 (2004-06-01), Goetz et al.
patent: 10-190390 (1998-07-01), None
Xu et al. A Theoretical and Experimental Study of Waveguide Coupled SAW Resonator Filters, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, vol. 42, No. 4, Jul. 1995.
Office Action, mailed Oct. 30, 2006, for U.S. Appl. No. 10/288,529.
Flowers James E.
Goetz Martin P.
Jones Christopher Ellis
Lee David M.
Lindars Paul
Nguyen Tai
Schwabe Williamson & Wyatt P.C.
Trinh Minh
LandOfFree
Method for forming a multi-frequency surface acoustic wave... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for forming a multi-frequency surface acoustic wave..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming a multi-frequency surface acoustic wave... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4212729