Metal working – Piezoelectric device making
Reexamination Certificate
2007-11-27
2007-11-27
Tugbang, A. Dexter (Department: 3729)
Metal working
Piezoelectric device making
C029S594000, C029S595000, C029S832000, C029S846000, C029S847000, C310S31300R
Reexamination Certificate
active
10288529
ABSTRACT:
Provided is a method of manufacturing a multi-frequency surface acoustic wave (SAW) device on a common piezoelectric substrate. The method features varying the resonant frequency of waveguide elements of the SAW device using a single etch step. The etch step removes a sub-portion of multiple layers of conductive film disposed on the substrate.
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Flowers James E.
Goetz Martin P.
Jones Christopher Ellis
Lee David M.
Lindars Paul
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