Fishing – trapping – and vermin destroying
Patent
1991-03-08
1993-08-17
Chaudhuri, Olik
Fishing, trapping, and vermin destroying
437117, 437 92, 4271263, 4271265, 427169, H01L 2120, H01L 21465, B05D 512, B05D 506
Patent
active
052368742
ABSTRACT:
A method is provided for forming a material layer in a semiconductor device using liquid phase deposition. A material layer such as a metal layer, a dielectric layer, a semiconductor layer or a superconducting layer is deposited by the liquid-phase thermal decomposition of a metal-organic precursor dissolved in an anhydrous organic solvent. The organic solvent has a chemical polarity corresponding to the selected metal-organic precursor and has a normal boiling point above the decomposition temperature of the selected precursor. As a result of few restrictions on the range of precursor physical properties, the present invention enables the use of a wide variety of molecular compositions which can be used for the formation of an equally wide variety of material layers. In one embodiment of the invention, a semiconductor substrate is subjected to a liquid mixture comprising a metal-substituted heterocyclic acetylacetonate precursor dissolved in tetradecane (b.p. 254.degree.C.). Depending upon the structure of the acetylacetonate, either a metal or a metal oxide film is deposited in the liquid phase on a semiconductor substrate immersed in a solution which is maintained at the decomposition temperature of the acetylacetonate precursor.
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Chaudhuri Olik
Dockrey Jasper W.
Motorola Inc.
Paladugu Ramamohan Rao
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