Method for forming a hard carbon thin film on article and applic

Details Method for forming a hard carbon thin film on article and applic Method for forming a hard carbon thin film on article and applic

1987-11-04

1988-09-20

Van Balen, William J.

Stock material or miscellaneous articles

Self-sustaining carbon mass or layer with impregnant or...

181167, 181170, 428446, 428457, 428688, B32B 900

Patent

active

047725133

ABSTRACT:
A method of forming diamond-like carbon layer which is advantageously adaptable as a coating layer on acoustic diaphragms. In the method, carbon vaporized out of solid carbon source is deposited onto the surface of the diaphragm as the coating layer in the atomosphere of catalystic gas, for instance, H.sub.2 +Ar or H.sub.2 of about 10.sup.-4 Torr. The deposited carbon layer on the surface of the diaphragm is an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond and crystalline carbon particles of hybridized orbital SP.sup.3 bond dispersed in the amorphous carbon, or an amorphous carbon of inclusion of hybridized orbital SP.sup.2 bond and hybridized orbital SP.sup.3 bond.

REFERENCES:
patent: 3969131 (1976-07-01), Fatzer et al.
patent: 3980105 (1976-09-01), Myskowski
patent: 4442165 (1984-04-01), Gebhardt et al.
patent: 4460060 (1984-07-01), Hasumi et al.
patent: 4552243 (1985-11-01), Mellillo et al.
patent: 4698256 (1987-10-01), Giglia et al.

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