Method for forming a hard bias structure in a...

Details Method for forming a hard bias structure in a... Method for forming a hard bias structure in a...

2007-10-23

2007-10-23

Kim, Paul D. (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S603080, C029S603130, C029S603150, C029S603180, C216S062000, C216S065000, C216S066000, C360S324110, C360S324120, C427S127000, C427S128000, C451S005000, C451S041000

Reexamination Certificate

active

10991712

ABSTRACT:
A method for forming a hard bias structure in a magnetoresistive sensor is disclosed. A magnetoresistive sensor having a soft magnetic bias layer, spacer layer, and a magnetoresistive layer, is formed over a substrate having a gap layer. A mask is formed over a portion of the magnetoresistive sensor structure to define a central region. The masked structure is ion milled to remove portions not shielded by the mask, to form the central region with sloped sides, and to expose a region of the gap layer laterally adjacent the sloped sides. A first underlayer is deposited onto at least the sloped sides at a high deposition angle. A second underlayer is deposited to at least partially overlap the first underlayer, and at a first lower deposition angle. A hard bias layer is deposited over at least a portion of the second underlayer, and at a second lower deposition angle.

REFERENCES:
patent: 5018037 (1991-05-01), Krounbi et al.
patent: 5434826 (1995-07-01), Ravipati et al.
patent: 5491600 (1996-02-01), Chen et al.
patent: 5532892 (1996-07-01), Nix et al.
patent: 5742459 (1998-04-01), Shen et al.
patent: 5892641 (1999-04-01), Ishiwata
patent: 6340533 (2002-01-01), Ueno et al.
patent: 6353318 (2002-03-01), Sin et al.
patent: 6449135 (2002-09-01), Ding et al.
patent: 6551357 (2003-04-01), Madduri
patent: 09161230 (1997-06-01), None

Affiliated with

Also associated with

Rating

Method for forming a hard bias structure in a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for forming a hard bias structure in a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming a hard bias structure in a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3835123