Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Patent
1995-06-07
1997-01-07
King, Roy V.
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
4272551, 4272481, 427572, 427573, 427576, 427578, 427596, 437 67, 437919, 148DIG50, C23C 1600, B05D 306
Patent
active
055914861
ABSTRACT:
A thin film forming method which comprises the steps of supporting a substrate to be treated, having a trench or an unevenness thereon, in a reaction vessel; introducing a reactive gas into the reaction vessel; activating the reactive gas to form a deposit species, the deposit species characterized by a phase diagram including a liquid phase region defined by a melting curve and an evaporation curve that intersect at a triple point; and forming a thin film containing at least a part of the deposit species on the substrate while retaining a pressure of the deposit species in the reaction vessel higher than the triple point of the phase diagram of the deposit species, and retaining a temperature of the substrate within the liquid phase region of the phase diagram of the deposit species.
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Noguchi Sadahisa
Okano Haruo
Sekine Makoto
Kabushiki Kaisha Toshiba
King Roy V.
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