Method for forming a deposited film

Details Method for forming a deposited film Method for forming a deposited film

1986-10-21

1989-03-14

Childs, Sadie

Coating processes

Electrical product produced

Fluorescent or phosphorescent base coating

427 70, 427255, 4272553, 437225, 437233, 437234, B05D 506, B05D 512, C23C 1600

Patent

active

048123250

ABSTRACT:
A method for forming a deposited film comprises introducing into a reaction space containing a substrate (a) a gaseous starting material for the formation of a deposited film, (b) a gaseous oxidizing agent, and optionally (c) a gaseous material containing a valence electron controller component; effecting chemical contact therebetween to form a plurality of precursors including precursors in an excited state; and forming a deposited film on the substrate with at least one of the precursors.

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