Fishing – trapping – and vermin destroying
Patent
1995-05-19
1996-08-20
Fourson, George
Fishing, trapping, and vermin destroying
437190, 437194, 437198, H01L 2128
Patent
active
055479014
ABSTRACT:
A method for forming a metal wiring of a semiconductor element, which uses an aluminum film as an oxidation prevention film to prevent oxygen from being diffused into copper contained in the metal wiring. An aluminum oxidation prevention film layer is selectively formed on an exposed surface of the copper metal wiring layer using a selective chemical vapor deposition method. The width of the aluminum layer formed is below 100.ANG., and is converted into Al.sub.2 O.sub.3 at heat treating or under an atmosphere, thereby preventing the copper from oxidation. A diffusion prevention film between the substrate and the copper metal wiring layer is further included for preventing the copper from diffusing into the substrate.
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Kim Jun K.
Lee Kyung I.
Bilodeau Thomas G.
Fourson George
LG Semicon Co. Ltd.
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