Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal – Responsive to electromagnetic radiation
Reexamination Certificate
2008-04-02
2010-11-30
Le, Dung A. (Department: 2818)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
Responsive to electromagnetic radiation
C438S094000, C438S572000, C438S796000, C438S508000
Reexamination Certificate
active
07842534
ABSTRACT:
A method is provided for fabricating a thin film semiconductor device. The method includes providing a plurality of raw semiconductor materials. The raw semiconductor materials undergo a pre-reacting process to form a homogeneous compound semiconductor target material. The compound semiconductor target material is deposited onto a substrate to form a thin film having a composition substantially the same as a composition of the compound semiconductor target material.
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Bruce Allan James
Cyrus Michael
Frolov Sergey
Le Dung A.
Mayer Stuart H.
Mayer & Williams PC
Sunlight Photonics Inc.
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