Method for forming a chamber in an electronic device and...

Details Method for forming a chamber in an electronic device and... Method for forming a chamber in an electronic device and...

2004-03-24

2008-08-12

Picardat, Kevin M. (Department: 2822)

Semiconductor device manufacturing: process

Making device or circuit emissive of nonelectrical signal

C438S027000, C438S065000, C438S116000

Reexamination Certificate

active

07410816

ABSTRACT:
A method is disclosed for forming a chamber in an electronic device, including the steps of preparing an outer surface on a solidified core material, the solidified core material in a depression formed in a substrate. The method further includes establishing a layer on the prepared outer surface of the solidified core material and a portion of the substrate surrounding the depression. The established layer and the substrate define a chamber.

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