Metal working – Electric condenser making – Solid dielectric type
Reexamination Certificate
2006-12-28
2010-06-15
Trinh, Minh (Department: 3729)
Metal working
Electric condenser making
Solid dielectric type
C029S025030, C029S025410, C361S320000, C361S311000, C427S079000, C438S240000
Reexamination Certificate
active
07735206
ABSTRACT:
A method for forming a capacitor dielectric includes depositing a zirconium oxide layer, performing a post-treatment on the zirconium oxide layer such that the zirconium oxide layer has a tetragonal phase, and depositing a tantalum oxide layer over the zirconium oxide layer such that the tantalum oxide layer has a tetragonal phase.
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Hynix / Semiconductor Inc.
Townsend and Townsend / and Crew LLP
Trinh Minh
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