Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of...
Patent
1998-07-06
1999-02-09
Nguyen, Tuan H.
Semiconductor device manufacturing: process
Forming bipolar transistor by formation or alteration of...
438365, 438350, H01L 21331
Patent
active
058693807
ABSTRACT:
A bipolar junction transistor structure and method of forming the bipolar junction transistor structure comprising an intrinsic base surrounded by a base link and an extrinsic base surrounding the base link. An emitter is formed above the base. The extrinsic base, base link, and intrinsic base are formed using ion implantation. A single layer of doped polysilicon is used to provide the doping source for the emitter and a collector contact. Silicide contacts to the emitter, collector, or base are not required or used.
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Ackerman Stephen B.
Industrial Technology Research Institute
Nguyen Tuan H.
Prescott Larry J.
Saile George O.
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