Method for formation of a self-aligned emission grid for field e

Details Method for formation of a self-aligned emission grid for field e Method for formation of a self-aligned emission grid for field e

1996-01-18

1999-01-26

Ramsey, Kenneth J.

Electric lamp and discharge devices

Discharge devices having a multipointed or serrated edge...

445 24, H01J 902

Patent

active

058642005

ABSTRACT:
According to the present invention, there is provided a method for forming an emitter grid in a substrate of a field emission display. In one embodiment of the invention, the method includes the step of forming an emitter in a trench in the substrate, the trench having a dimension which is substantially the same as a desired dimension of the emitter grid, disposing a dielectric layer on the substrate, and disposing a grid material layer on the dielectric layer. The field emission display is then planarized to expose a portion of the dielectric which contacts the emitter.

REFERENCES:
patent: 5302238 (1994-04-01), Roe et al.
patent: 5572041 (1996-11-01), Betsui et al.
patent: 5620350 (1997-04-01), Takemura

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