Method for focusing projection printer

Details Method for focusing projection printer Method for focusing projection printer

1986-08-27

1987-07-21

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Methods

355 53, 355132, G03B 2732

Patent

active

046814302

ABSTRACT:
An improved method for automatically focusing an integrated circuit manufacturing projection step and repeat photolithography printer employing an optical signal to focus the printer is disclosed. The automatic focusing is achieved by reflecting an optical signal off a photoresist layer on the surface of a wafer and converting the reflected optical signal into an electronic signal employed to focus the printer. According to the preferred embodiment of the present invention, a dye which absorbs light at the wavelength the optical signal is added to the photoresist layer to improve the quality of the reflected optical signal thereby considerably reducing or eliminating focusing errors.

REFERENCES:
patent: 3411905 (1968-11-01), Mooney et al.
patent: 3877810 (1975-04-01), Feldstein
patent: 4231657 (1980-11-01), Iwamatsu
patent: 4405229 (1983-09-01), Mayer
patent: 4437758 (1984-03-01), Suzuki

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