Method for fluid treating a substrate

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents

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Details

134 32, 134 34, 134 36, B08B 102, B08B 304

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active

055650406

ABSTRACT:
A new method for treating substrates with fluids, as well as corresponding fluid treatment apparatus. The new apparatus includes a new configuration of fluid jet injectors which substantially overcomes the problem of dragout, in which fluid impinged upon an area of a substrate is retained on that area, preventing fresh fluid from reaching the impinged area. This new configuration also avoids imposing torques on substrates, and substantially reduces the need for rollers and guides for transporting substrates.

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