Fluid handling – With heating or cooling of the system – With electric heating element
Reexamination Certificate
2011-04-19
2011-04-19
Hepperle, Stephen M (Department: 3753)
Fluid handling
With heating or cooling of the system
With electric heating element
C137S487500
Reexamination Certificate
active
07926509
ABSTRACT:
Disclosed is a method of controlling the flow rate of clustering fluid using a pressure type flow rate control device in which the flow rate Q of gas passing through an orifice is computed as K=KP1 (where K is a constant) with the gas being in a state where the ratio P2/P1 between the gas pressure P1 on the upstream side of the orifice and the gas pressure P2 on the downstream side of the orifice is held at a value not higher than the critical pressure ratio of the gas wherein the association of molecules is dissociated either by heating the pressure type flow rate control device to the temperature higher than 40° C., or by applying the diluting gas to the clustering fluid to make it lower than a partial pressure so the clustering fluid is permitted to pass through the orifice in a monomolecular state.
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Dohi Ryousuke
Ikeda Nobukazu
Mizusawa Kenetu
Nagase Masaaki
Nishino Kouji
Fujikin Incorporated
Griffin & Szipl, P.C.
Hepperle Stephen M
Ohmi Tadahiro
Rost Andrew J
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