Method for final rinse/dry for critical cleaning application

Details Method for final rinse/dry for critical cleaning application Method for final rinse/dry for critical cleaning application

1995-04-12

1998-07-07

Warden, Jill

Cleaning and liquid contact with solids

Processes

Combined

134 21, 134 26, 134 31, 134 36, 134 37, B08B 304, B08B 704

Patent

active

057762597

ABSTRACT:
A method for final rinse/dry for critically cleaning articles includes prefiltering a liquid, and flowing the ultrapurified liquid to a holding chamber containing articles so that the ultrapurified liquid rinses the articles in the holding chamber. After ceasing the flow of ultrapurified liquid and draining residual liquid from the holding chamber, an inert gases flows to the holding chamber to provide an inert atmosphere therein, and the holding chamber is heated by way of a heater to dry the articles. Then, the inert gas is purged from the holding chamber.

REFERENCES:
patent: 3727620 (1973-04-01), Orr
patent: 4749440 (1988-06-01), Blackwood et al.
patent: 4917123 (1990-04-01), McConnell et al.
patent: 4984597 (1991-01-01), McConnell et al.
patent: 5039349 (1991-08-01), Schoeppel
patent: 5301701 (1994-04-01), Nafziger

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