Etching a substrate: processes – Forming or treating article containing magnetically...
Reexamination Certificate
2007-11-27
2007-11-27
Olsen, Allan (Department: 1763)
Etching a substrate: processes
Forming or treating article containing magnetically...
C216S038000, C216S039000, C216S066000, C216S072000
Reexamination Certificate
active
11015670
ABSTRACT:
A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.
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Hattori Kazuhiro
Hibi Mikiharu
Okawa Shuichi
Suwa Takahiro
Oliff & Berridg,e PLC
Olsen Allan
TDK Corporation
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