Method for feeding metalorganic gas from solid raw materials in

Details Method for feeding metalorganic gas from solid raw materials in Method for feeding metalorganic gas from solid raw materials in

1996-03-27

1998-03-03

Bennett, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With fluid current conveying of treated material

34408, F26B 1700

Patent

active

057221847

ABSTRACT:
A method for feeding metalorganic gas from solid raw materials in MOCVD and its device provides an absorption reagent consisting of porous grains into which a solid metalorganic material is absorbed and the passing of the carrier gas among the absorptive porous grains in the container under a high thermal condition. The mixture gas including the metalorganic gas at a constant density is obtained in stability for a long time.

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patent: 5019423 (1991-05-01), Hiai et al.
patent: 5377429 (1995-01-01), Sandhu et al.
patent: 5480677 (1996-01-01), Li et al.
patent: 5553395 (1996-09-01), Wen et al.

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