Method for failure analysis and system for failure analysis

Details Method for failure analysis and system for failure analysis Method for failure analysis and system for failure analysis

2007-04-03

2007-04-03

Barbee, Manuel L. (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

C702S183000, C250S309000

Reexamination Certificate

active

10339356

ABSTRACT:
After completion of an arbitrary device process, an apparatus for micro-sample extraction extracts a part of a wafer as a micro-sample of a size equal to or larger than a repetition pattern with a probe and places the extracted micro-sample to a micro-sample storage, and the micro-sample storage is stored into an apparatus for micro-sample storage. The wafer is subjected to a post process and an observation desired position is determined in response to a failure analysis requirement. After that, the micro-sample is unloaded from the micro-sample storage by an apparatus for additional processing of the micro-sample and is placed onto an observation sample holder. By performing an additional process in the observation desired position, a failure analysis sample is prepared, and analysis information obtained by an apparatus for failure analysis is output.

REFERENCES:
patent: 5153818 (1992-10-01), Mukougawa et al.
patent: 5844416 (1998-12-01), Campbell et al.
patent: 6199059 (2001-03-01), Dahan et al.
patent: 6753538 (2004-06-01), Musil et al.
patent: 2002/0166976 (2002-11-01), Sugaya et al.
patent: 2003/0169060 (2003-09-01), Shinada et al.
patent: 2003/0206027 (2003-11-01), Nozoe et al.
patent: 5-52721 (1993-03-01), None
patent: 07-302826 (1995-11-01), None
patent: 11-265679 (1999-09-01), None
patent: 2000-156393 (2000-06-01), None
Material Research Society, Symposium Proceedings, vol. 480, 1997, pp. 19-27.
Proceedings of the 22nd International Symposium for Testing and Failure Analysis, Nov. 18-22, 1996, pp. 199-205.

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