Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate
2005-02-22
2005-02-22
Bovernick, Rodney (Department: 2874)
Optical waveguides
Planar optical waveguide
Thin film optical waveguide
C385S129000, C065S386000
Reexamination Certificate
active
06859603
ABSTRACT:
A manufacturing process is provided for fabrication of vertically coupled integrated photonic devices by projection lithographic technique. A multi-layered structure is formed which includes a pair of core waveguiding layers separated by a coupling interlayer and sandwiched between cladding layers. Prior to forming optical features in the core layers, alignment marks are etched completely through the whole multi-layered structure with the alignment marks being visible on both sides of the multi-layered structure to a conventional projection stepper. After the alignment marks are formed, a “bottom level” optical features are made through the bottom cladding layer, bottom core layer, and portion of intervening coupling layer. The formed sample is then bonded by a polymer to a carrier and a “top level” optical features are defined through the top cladding, top core layer, and portion of the intervening coupling layer.
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Absil Philippe
Ho Ping-Tong
Hryniewicz John
King Oliver
Little Brent
Bovernick Rodney
Kang Juliana K.
Rosenberg , Klein & Lee
University of Maryland College Park
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